In the semiconductor industry, precise control of temperature is crucial during the processing of wafers to ensure high yields and optimal performance. Traditional temperature measurement methods, such as thermocouples, can be inadequate due to their slow response time and susceptibility to electromagnetic interference. Fiber optic sensors, specifically Fiber Bragg Grating (FBG) sensors, offer a solution by providing accurate and real-time temperature measurements with high spatial resolution, making them ideal for thermal mapping during wafer processing.
Fiberoptic Process Control
Together with industry leading companies FiSens develops cutting-edge fiberoptic sensing solutions for accurate measurements of temperatures and strains.Contact